| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46c398473acd01f6a9ef396362801d00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5e536f3d613ef2ec8729f85722becb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2540f9f0458e1d5395619d3ebd4efff9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3399faa8432a12064a492cc3e6f40165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5383f99646217338e28885e536e349a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99925cfa1fe69de02eb6da8a2ce882a0 |
| publicationDate |
2011-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011104398-A1 |
| titleOfInvention |
Method and system for depositing multiple materials on a substrate |
| abstract |
A system for depositing two or more materials on a substrate is provided. The system comprises one or more susceptors configured to define two or more recesses for accommodating at least a first material and a second material respectively. The first and second materials are different. The system further comprises one or more heaters for heating the first material and the second material for sublimation of the first and second materials for deposition on the substrate. A method for depositing two or more materials on a substrate is also presented. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013183793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8956698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102888589-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014205768-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013019805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014238299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9150952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017213962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778081-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9887357-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I560292-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9945025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831430-B2 |
| priorityDate |
2009-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |