http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011097671-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-312 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2010-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa6b524d3fd43a2b1cf563da94bf1c25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33449bced477630c68973916ac956ae9 |
| publicationDate | 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2011097671-A1 |
| titleOfInvention | Antistatic treatment agent, and antistatic film, coated article and pattern forming method using the agent |
| abstract | The invention provides an antistatic treatment agent having an ability of preventing resist film thinning phenomenon in a chemically amplified resist, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent, in particular, the invention provides an antistatic treatment agent comprising an aqueous solvent-soluble electroconductive polymer, a diamine (divalent) or polyamine (polyvalent) aliphatic basic compound and an anionic surfactant, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent. As the aqueous solvent-soluble electroconductive polymer, a π-conjugated electroconductive polymer having a Brönsted acid group is a sulfonic acid group is preferred and it is preferable that the amount of the diamine (divalent) or polyamine (polyvalent) aliphatic basic compound be from 0.1 to 75 mol % based on the total number of moles of the basic compounds. |
| priorityDate | 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 241.