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publicationDate 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011097493-A1
titleOfInvention Fluid distribution manifold including non-parallel non-perpendicular slots
abstract A fluid conveyance device for thin film material deposition includes a substrate transport mechanism that causes a substrate to travels in a direction. A fluid distribution manifold includes an output face. The output face includes a plurality of elongated slots. At least one of the elongated slots includes a portion that is non-perpendicular and non-parallel relative to the direction of substrate travel.
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