Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08 |
filingDate |
2009-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ecdc565033f345e2aa2501e2f81c64f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0db0e60d0ed73a2d552bc4a6e2ceb077 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_858bdab6cf46406e44dd9a22ee47f756 |
publicationDate |
2011-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2011070462-A1 |
titleOfInvention |
Pattern forming method |
abstract |
Disclosed is a pattern forming method having a first step of forming a first ultraviolet curable resin layer on a substrate, a second step of leading a pattern-formed surface of a first mold wherein a predetermined pattern is formed to oppose the first ultraviolet curable resin layer, and attaching the substrate to the first mold by applying pressure, and a third step of irradiating diffused ultraviolet rays on the first ultraviolet curable resin layer, to which the pattern of the first mold is transferred by the pressure-attaching, the irradiated ultraviolet rays being diffused by disposing an ultraviolet light diffusion member between the ultraviolet curable resin layer and an ultraviolet light source. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012128811-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443940-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011019307-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637225-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11656546-B2 |
priorityDate |
2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |