| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69cd6e59ba10cd087f2b4145eaf39657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e61ab36000ab3e7600b44bd791a1aa3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_892011d581887e749c19d6a0a535211a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd5635a366bf6fcd9a5d53e816c174da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d360bc7d4aee5a301e0a22788e3da21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60130a3725854cca2a99ee5507000604 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-0017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-0013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-00 |
| filingDate |
2010-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb1af65110be463a5d2d11a0580e057f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b2270892e6fc3c103ad4e1baca02598
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d84d631ae693f2c320ea4d9325d3dad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a68d46d8c59c48f94f4632582d9f2ff9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e28bdf29032b532b3f8226c8d26f32c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_954dae7301877cdc20ce5c3925a37421 |
| publicationDate |
2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011065621-A1 |
| titleOfInvention |
Material for cleaning a substrate |
| abstract |
Material for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causes the particle to be removed along with the tri-state body. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010206340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10767143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8608859-B2 |
| priorityDate |
2005-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |