| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-128 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2009-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9454cca25d0b04a98d1791c86b60d5b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3676b2153c03c5f0526eb572f3e72318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee565e0921f3f7c3d4efebf21724b53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3711ee11aa12aacc25d935f3a6f12b8a |
| publicationDate |
2011-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011059396-A1 |
| titleOfInvention |
Patterning process and chemical amplified photoresist with a photodegradable base |
| abstract |
A method for fabricating an integrated circuit device is disclosed. The method includes providing a substrate; forming a first material layer over the substrate; forming a second material layer over the first material layer, wherein the second material layer comprises a photodegradable base material; and exposing at least a portion of the second material layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020050726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015072274-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9235123-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9274424-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014178806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9235120-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014018556-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126651-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10139727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015160555-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014287362-A1 |
| priorityDate |
2009-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |