| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08 |
| filingDate |
2009-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98403a2734a99287afe3711b5bd40b59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4462b4c95060aea5394c450b76ca0cf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_419b49859ba54ecfde6c4b83800536b4 |
| publicationDate |
2011-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011042862-A1 |
| titleOfInvention |
Stabilizers for Vinyl Ether Resist Formulations for Imprint Lithography |
| abstract |
Coating compositions suitable for UV imprint lithographic applications include at least one vinyl ether crosslinker having at least two vinyl ether groups; at least one diluent comprising a monofunctional vinyl ether compound; at least one photoacid generator soluble in a selected one or both of the at least one monofunctional vinyl ether compound and the at least one vinyl ether crosslinker having the at least two vinyl ether groups; and at least one stabilizer comprising an ester compound selectively substituted with a substituent at an ester position or an alpha and the ester positions. Also disclosed are imprint processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10589457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015228498-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9981419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016136873-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11549020-B2 |
| priorityDate |
2009-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |