| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-2697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F15-00 |
| filingDate |
2009-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d7e9ea9b78ece765675bf29ffec07f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01f8080f00f9233a5aac80bf9f05c963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5057dd7b348a7502eeed5f210b2f1311 |
| publicationDate |
2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011035186-A1 |
| titleOfInvention |
Portable wireless sensor |
| abstract |
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014138355-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011035043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103397312-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11712784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022036457-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9403256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9594370-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9140504-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019071053-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8712571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9403254-B2 |
| priorityDate |
2009-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |