| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5a65afd2c0d431385c1f67a0660a28e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-764 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J27-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-745 |
| filingDate |
2009-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f12ce1553f6cfd7993913301831b7875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46488824114e586f7b0c349432df7754 |
| publicationDate |
2011-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011034329-A1 |
| titleOfInvention |
Method for forming porous material in microcavity or micropassage by mechanicochemical polishing |
| abstract |
A surface of a substrate comprising microcavities leading out of the substrate is placed in contact with an aqueous solution comprising a plurality of suspended particles and a fabric. Perpendicular pressure is applied the expanse of the substrate between the fabric and the surface of the substrate, and relative movement of the fabric and the surface is applied to the expanse of the substrate. At least one particle is thus fed into each microcavity, therein forming a porous material that is a catalyst material for nanothread or nanotube growth. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553447-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018330965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108878363-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9917058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496169-B2 |
| priorityDate |
2008-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |