http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011028002-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d231147f38595bbe3114b758cba4a298
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
filingDate 2010-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cf92513f61f53e32d51cc310367a073
publicationDate 2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011028002-A1
titleOfInvention Semiconductor device and method of manufacturing the same
abstract A method of forming a semiconductor device includes the following processes. A metal nitride film is formed with a thickness of 3 nm or less over a substrate. The metal nitride film is oxidized to form a metal oxide film. A set of the formation of the metal nitride film and the oxidation of the metal nitride film is repeated, to form a stack of the metal oxide films over the substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113113284-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11414751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012128960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015225852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9045825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106971937-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102012017894-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9425071-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013161789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9650715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012214300-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019378754-A1
priorityDate 2009-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104352-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010019302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009258470-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23926
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25199637
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452397242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23986
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61685
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24193
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239

Total number of triples: 72.