| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98d6ef8ea9542700a5ce7b3e6af4d881 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-02 |
| filingDate |
2010-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c64f722a85b6da006fcd8d414cf9ca3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaa1f67c3c6a84f3327e09165d51f7fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5399d7c08a6fa2040aeaee76375ffeba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2267e470a1fdfd6c274a175d3217ecd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65350704578c5b98f9330e995f73994c |
| publicationDate |
2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011017608-A1 |
| titleOfInvention |
Electrochemical etching and polishing of conductive substrates |
| abstract |
A method for electrochemically etching a metal layer through an etch-resist layer pattern using a non-active electrolyte solution is described. The method is particularly useful in fabrication of advanced fuel delivery systems for land-based power generation turbines and aerospace turbine engines; of components for advanced thermal management in aerospace electronic devices and in cooling channels; of stents used in medicine; and of microchannels for sensors, chemical reactors, and dialysis and the like. In one embodiment of the invention the metal layer is copper and the non-active electrolyte solution is a mixture of sodium nitrate and sodium chloride and a pulse electric current is employed to accomplish the electrochemical etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11196753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9006147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9987699-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103388173-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102677141-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102965719-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103014814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020128021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9303330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10100423-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10686801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9783909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012083082-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014360886-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524068-B2 |
| priorityDate |
2009-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |