| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 |
| filingDate |
2010-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfe56f7d4b2250a378a85fb19ef092eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88f5ff1a1d3f778504e275e319b773b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc17948270d239368c7b9743ab75823d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b3f00cefc1ffd08eb8b0c27f6f1cd32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7837f0a1f84b64f6439a6cd9e782c390
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e195540b9b94d3306b8a5c13e6a58f4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c482e39c59155afda6e3919b053db560
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a47366e8ba9e739c2060695bf57cb95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3abdbc52aac0742fdca683103bd0757e |
| publicationDate |
2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011012188-A1 |
| titleOfInvention |
Semiconductor memory device |
| abstract |
A semiconductor memory device includes: a stacked body formed of a plurality of inter-layer insulating films and a plurality of electrode films alternately stacked and having a through-hole formed in the stacking direction; an electrode-side insulating film of a film thickness of 4 nm or more provided on an inner surface of the through-hole; a charge storage film provided on the electrode-side insulating film; a semiconductor-side insulating film of a film thickness of 4 nm or more provided on the charge storage film; and a semiconductor pillar buried in the through-hole. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941053-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109427812-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9548085-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9425207-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10170248-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107180834-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016005755-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017256560-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106298785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081495-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9734949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9082555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101826221-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017301674-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105280559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9893080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013051126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011018050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109727994-A |
| priorityDate |
2009-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |