http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011012175-A1

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publicationDate 2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011012175-A1
titleOfInvention Semiconductor wafer, semiconductor wafer manufacturing method, and electronic device
abstract A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; a Ge layer that is crystal-grown on the wafer and shaped as an isolated island; and a functional layer that is crystal-grown on the Ge layer. The Ge layer may be shaped as an island having a size that docs not exceed double a distance moved by crystal defects as a result of annealing the Ge layer at a certain temperature for a certain time. The Ge layer may be shaped as an island having a size for which stress due to a difference relative to a thermal expansion coefficient of Si, which is material of the wafer, does not cause crystal dejects when the Ge layer is annealed at a certain temperature.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015207330-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8823141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8890213-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8709904-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011227042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105355563-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011227199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835980-B2
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