http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011007303-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate | 2010-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4d300c61c851ee371473aa88b6173b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cefa908623a2fbdae29e2c40b37f00d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06610037564f839ef8e148b783df43f1 |
| publicationDate | 2011-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2011007303-A1 |
| titleOfInvention | Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials |
| abstract | A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to emit a species capable of being optically monitored. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9001489-B2 |
| priorityDate | 2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.