| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3726ffb3fb79701980cbfff04cfe7d63 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-24227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-24137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01029 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-82 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-70 |
| filingDate |
2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c14adf1b9e96120afa493ed1806a6513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e356a02ea93adc62e89f8a518541bdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ea45c7bd2708df76705774f13ce36a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c3ef44ee64d37ebf9a2d9e2586bc7f5 |
| publicationDate |
2011-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011003422-A1 |
| titleOfInvention |
Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| abstract |
A method of forming Monolithic CMOS-MEMS hybrid integrated, packaged structures includes the steps of providing: providing at least one semiconductor substrate having a CMOS device area including dielectric layers and metallization layers; applying at least one protective layer overlying the CMOS device area; forming at least one opening on the protective layer and patterning the dielectric and metallization layers to access the semiconductor substrate; forming at least one opening on the semiconductor substrate by etching the dielectric and metallization layers; applying at least one filler layer in the at least one opening on the semiconductor substrate; positioning at least one chip on the filler layer, the chip including a prefabricated front face and a bare backside; applying a first insulating layer covering the front face of the chip providing continuity from the semiconductor substrate to the chip; forming at least one via opening on the insulating layer covering the chip to access at least one contact area; applying at least one metallization layer overlying the insulating layer on the substrate and the chip connecting the metallization layer on the substrate to the at least one another contact area on the chip; applying a second insulating layer overlying the metallization layer on the at least one chip; applying at least one interfacial layer; applying at least one rigid substrate overlying the interfacial layer; and applying at least one secondary protective layer overlying the rigid substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020243248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312185-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I472017-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11677373-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9234879-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367939-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373908-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11161773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10201091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015171597-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11076489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665377-B2 |
| priorityDate |
2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |