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publicationDate 2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010326956-A1
titleOfInvention Method for manufacturing substrate for mass spectrometry
abstract A substrate for mass spectrometry for effectively performing ionization has been demanded. The substrate for mass spectrometry includes a base, a porous film formed on the base, and an inorganic material film formed on the porous film. The inorganic material film has a plurality of concaves formed vertically to the base, and the diameter of the concaves is not less than 1 nm and less than 1 μm.
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