| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f157e1ba59c4453c0fbfffa7326572ed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-03921 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-16 |
| filingDate |
2007-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b687354f89165bb5c81e59e444645d13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc231a1ba8cf8088d94ed450539202ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5798887998a498be4f0ee091afb313b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0bd858f9f0e021d56fc6e0260387cdc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5dc3cd2cc39749706feba16431b2b423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e4da7b33e8794d857733d304853a762 |
| publicationDate |
2010-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010291322-A1 |
| titleOfInvention |
Method for making titanium-based compound film of poly silicon solar cell |
| abstract |
A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate. |
| priorityDate |
2007-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |