| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B66F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67733 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B66F19-00 |
| filingDate |
2009-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73894e84103f4a90cf94cf10cad8b31a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f3851da72c34df2e86950f66628d0f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1bb6a7320f66cf14f1ab8fa52821fa6 |
| publicationDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010278622-A1 |
| titleOfInvention |
Automated Materials Handling System Having Multiple Categories of Overhead Buffers |
| abstract |
An automated materials handling system comprises a plurality of overhead hoist buffers (OHBs) for receiving a plurality of semiconductor wafer carriers. Each OHB is assigned to a respective one of a plurality of categories. Each wafer carrier is associated with one or more of the plurality of categories. Each respective category is associated with at least one of a plurality of event trigger types. An overhead transport (OHT) if provided for transporting each of the plurality of wafer carriers to a respective one of the OHBs in response to a respective trigger event. Each trigger event has one of the plurality of event trigger types. Each wafer carrier is stored in a respective one of the plurality of OHBs assigned to a respective one of the categories associated with the respective event trigger type of the trigger event causing that wafer carrier to be transported and stored. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114582772-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11092949-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I734915-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116341886-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018211898-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009279989-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018211898-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013166383-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10101733-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867823-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9305815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016091891-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023129544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171027-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014019164-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11782428-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016004244-A1 |
| priorityDate |
2009-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |