| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e98b5505f56c757bb3155ef3005439d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a14ef511c024661e8ef1d0a54f36377 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00 |
| filingDate |
2009-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e580f27f74d52fb4c220cad0265eb783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f16ba5e5c2fa525dceb4ead6b96767ca |
| publicationDate |
2010-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010256405-A1 |
| titleOfInvention |
Synthesis of allyl-containing precursors for the deposition of metal-containing films |
| abstract |
Methods and compositions for depositing a film on one or more substrates include providing a reactor with at least one substrate disposed in the reactor. At least one metal precursor is provided and at least partially deposited on the substrate to form a metal containing film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011198670-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8330235-B2 |
| priorityDate |
2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |