| abstract |
The invention relates to a silicon-ceramic composite substrate ( 01 ), which comprises a low-temperature ceramic ( 02 ) having at least one pre-structured ceramic layer and a silicon substrate ( 03 ). According to the invention, the low-temperature ceramic ( 02 ) forms a carrier layer and the silicon substrate surface has nanostructures ( 06 ), which are completely penetrated into the low-temperature ceramic ( 02 ), in a contact area ( 04 ) with the carrier layer. |