| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f92f6b2b38d51ace4f24a3318c3bd7d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_19c23df7dad531fad4c0dc71d3b87251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c124e2cfc3276bc60b9ed620155442a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D181-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D165-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L81-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L63-00 |
| filingDate |
2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fe14d4336a37b2e6e4bb31e1393cbc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35158fe67c1831f890c80ef48ce57349
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa166107cae23b7e18ada45a17ddc05a |
| publicationDate |
2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010248137-A1 |
| titleOfInvention |
Antireflective Coating Compositons |
| abstract |
The present invention discloses novel bottom anti-reflective coating compositions where a coating from the composition has an etch rate that can be regulated by the etch plate temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088564-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009061347-A1 |
| priorityDate |
2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |