| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-04 |
| filingDate |
2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abac9df38ac99f3ca58312321ce63452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b69846e689266d71d907d913b33258b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b0ab3c13a191f64309268929a643e3e |
| publicationDate |
2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010243456-A1 |
| titleOfInvention |
Molten salt bath, method for preparing the same, and tungsten film |
| abstract |
A molten salt bath contains tungsten and has a water content of 100 ppm or less and an iron content of 500 ppm or less. The molten salt bath from which high-quality tungsten can be stably deposited, a method for preparing the molten salt bath, and a tungsten film are provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9199433-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012315502-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993121-B2 |
| priorityDate |
2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |