| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_83fa3455731039fca4b9d5f551f52f9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6584755dd2118a3d83a889a594253cb8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2009-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a370a1005a5237230838fb55ae4e433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abb0df4a83e5404958bd13e9a9a77460 |
| publicationDate |
2010-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010239983-A1 |
| titleOfInvention |
Methods Of Forming Patterns On Substrates |
| abstract |
A method of forming a pattern on a substrate includes forming spaced first features over a substrate. The spaced first features have opposing lateral sidewalls. Material is formed onto the opposing lateral sidewalls of the spaced first features. That portion of such material which is received against each of the opposing lateral sidewalls is of different composition from composition of each of the opposing lateral sidewalls. At least one of such portion of the material and the spaced first features is densified to move the at least one laterally away from the other of the at least one to form a void space between each of the opposing lateral sidewalls and such portion of the material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014110805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465287-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790522-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8956808-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10007056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9213239-B2 |
| priorityDate |
2009-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |