| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2003-1053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31544 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1009 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-06 |
| filingDate |
2007-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a33a76e9a05a7a3c0063a06e2afe4f58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80b5a2fb1cad9c00a5c9a993ce5748bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b5672771130268b651396d2b5566620
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3b08b326df0fb8dedc7e284db05c11f |
| publicationDate |
2010-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010239867-A1 |
| titleOfInvention |
Sealing material, parts for plasma treating equipment having said sealing material, and process for preparing said sealing material |
| abstract |
The present invention provides a sealing material having excellent plasma resistance, sealing property and non-sticking property, parts for plasma treating equipment having the sealing material, and a process for preparing the sealing material. The sealing material comprises a fluoroelastomer sealing material and a coating film formed by using an inorganic material on the surface of the fluoroelastomer sealing material, wherein a ratio of weight reduction of the sealing material after dipping it in perfluoro tri-n-butylamine at 60° C. for 70 hours and then taking it out and drying it at 90° C. for 5 hours, at 125° C. for 5 hours, and then at 200° C. for 10 hours, is not more than 0.4% by weight. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2915836-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014060811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9404334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2585108-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015252151-A1 |
| priorityDate |
2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |