| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 |
| filingDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621833d90613ad1cd50f2aa3269e7ee3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9daf5210d369561850e7367628195f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfec7d2abc46d2c712a8874b95450fd5 |
| publicationDate |
2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010233829-A1 |
| titleOfInvention |
Cyclic amino compounds for low-k silylation |
| abstract |
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8492170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013042790-A1 |
| priorityDate |
2009-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |