| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1089 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caa44e16ee81b9ec580a8325ace6080b |
| publicationDate |
2010-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010219157-A1 |
| titleOfInvention |
Film forming apparatus and film forming method |
| abstract |
A film forming apparatus 100 is provided with a processing chamber 2 for accommodating a wafer W; a gas supply section 10 for supplying inside the processing chamber 2 with a gas containing a Cu material gas and an Mn material gas; a shower head 4 for introducing the gas fed from the gas supply section 10 into the processing chamber 2; and a vacuum pump 8 for exhausting inside the processing chamber 2. The gas supply section 10 is provided with a Cu material storing section 21; an Mn material storing section 22; a manifold 40 to which the Cu material and the Mn material are introduced to be mixed; one vaporizer 42 for vaporizing the mixture formed at the manifold 40; and material gas supply piping 54 for introducing into the shower head 4 the material gas formed by vaporization. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022162752-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017160614-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9053987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017160612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943803-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8628618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551564-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014182515-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8225745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015118776-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011124201-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012322273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10453721-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9637821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011020544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11189489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011111136-A1 |
| priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |