http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010213851-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e8912da9a956c2bdd303d89aa83fcaa
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F03H1-0093
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
filingDate 2008-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4fd8fe55ee2f3f02635f132359cc8e5
publicationDate 2010-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010213851-A1
titleOfInvention Plasma source
abstract An RF based, gridless improved plasma source and method of operating a plasma source comprising a RF coupler, a first stage with a helicon-like system, a ICH second stage, a ionization chamber, magnetic means which are strengthened on the downstream end of the first stage, to control the plasma flux, ionization fraction, spatial distribution.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016200458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016189937-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019074116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11325727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017198683-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3038924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3038925-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019074785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102623154-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10260487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113665848-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014099782-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10008371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114205985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012007503-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112160884-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016207642-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9796487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9299536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9134074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012194074-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3038924-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3038925-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015057829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023069229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11231023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11365016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11067065-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106068054-A
priorityDate 2007-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6293090-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5430355-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7420182-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557109
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224

Total number of triples: 58.