| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2010-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3224c3bdfc81965402ef4cd0048c1847 |
| publicationDate |
2010-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010207648-A1 |
| titleOfInvention |
Contact Resistance Test Structure and Method Suitable for Three-Dimensional Integrated Circuits |
| abstract |
A contact resistance test structure, a method for fabricating the contact resistance test structure and a method for measuring a contact resistance while using the contact resistance test structure are all predicated upon two parallel conductor lines (or multiples thereof) that are contacted by one perpendicular conductor line absent a via interposed there between. The test structure and related methods are applicable within the context of three-dimensional integrated circuits. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101390140-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9252202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040986-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11002788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9689914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113658939-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019206746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10288676-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013048979-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103426865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103137604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9293381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015011028-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2980639-A1 |
| priorityDate |
2009-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |