| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9db6f41d4a579971650872dce4de0d96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5661945f8920c1c6fac0059e0538c70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_065a63c73aea99bae3533daf41735151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9f80a7ee9358afddc608f12876c4777
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e088ee4cbb774d3bc9320a1b91632469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d5a3fde5982ba06bc0fcf29b33ca208 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-631 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2010-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b8b2678dac92d0330fa48c6be465b7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49868db2277985eff023e0140584075b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5e93e3445d69fe489819282dae27537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad7861736e93c439dc3dbda7f5ddbf38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcbafb491a84e5b2f41ed2597caf5788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_735c7450203992dd33e15490399a0c5f |
| publicationDate |
2010-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010206233-A1 |
| titleOfInvention |
Device and Method for Vaporizing Temperature Sensitive Materials |
| abstract |
A device vaporizes organic materials onto a substrate surface to form a film. The device includes a vaporization apparatus to receive a quantity of organic material that can have one or more components each having a different vaporization temperature, the vaporization apparatus having a first region and a second region spaced from the first region; a cooling unit to actively cool the organic material in the first region so that each of the one or more organic components is maintained well below its vaporization temperature to reduce degradation of the organic material; heating unit to heat the second region of the vaporization apparatus above the vaporization temperature of each of the one or more organic components; and a metering unit having a permeable member to meter organic material at a controlled rate from the first region into the second region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021238734-A1 |
| priorityDate |
2004-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |