http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010193374-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd83260a96356882b5f50dd097411a72 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12 |
| filingDate | 2010-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09b2b2c5afabbe0467962546cab0aa0e |
| publicationDate | 2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2010193374-A1 |
| titleOfInvention | Method of rear surface treatment, analysis method of integrated circuit from rear surface side, and rear surface treatment apparatus |
| abstract | A method of rear surface treatment is carried out by: preparing a semiconductor or device in which an integrated circuit having a plurality of electrodes is provided on the front surface of a semiconductor substrate; electrically con netting the plurality of electrodes to an anode; and electropolishing the rear surface of the semiconductor substrate by performing anodic oxidation with an electrolytic solution placed in contact with the rear surface of the semiconductor substrate. |
| priorityDate | 2009-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502001 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20975871 |
Total number of triples: 13.