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publicationDate 2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2010193215-A1
titleOfInvention Structure comprising a getter layer and an adjusting sublayer and fabrication process
abstract The structure comprises at least a device, for example a microelectronic chip, and at least a getter arranged in a cavity under a controlled atmosphere delineated by a substrate and a sealing cover. The getter comprises at least one preferably metallic getter layer, and an adjustment sub-layer made from pure metal, situated between the getter layer and the substrate, on which it is formed. The adjustment sub-layer is designed to modulate the activation temperature of the getter layer. The getter layer comprises two elementary getter layers.
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Total number of triples: 43.