| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46 |
| filingDate |
2010-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c271f0d576710d3b5078833d42e3670b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea0d777e81f9141c8323aeaf5d6adbca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_738e0cd9f5268fb675eac62dbf6af009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ce984133691477e967891b99216338a |
| publicationDate |
2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010187095-A1 |
| titleOfInvention |
Manufacturing method of a boride film, and manufacturing method of an electron-emitting device |
| abstract |
A boride film is deposited on a substrate through an opening portion a shield member located between the substrate and a target by means of a sputtering method. The shield member is arranged so as to shield between an erosion region of the target and the substrate. A distribution of plasma density in a space between the substrate and the target is set in such a manner that a plasma density in a region in which the opening portion is located becomes higher than a plasma density in a region shielded by the shield member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105390360-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105390360-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437404-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105390361-A |
| priorityDate |
2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |