| abstract |
In the present disclosure a device for sensing and/or actuation purposes is presented in which microstructures ( 20 ) comprising shafts ( 2 ) with different functionality and dimensions can be inserted in a modular way. That way, out-of-plane connectivity, mechanical clamping between the microstructures ( 20 ) and a substrate ( 1 ) of the device, and electrical connection between electrodes ( 5 ) on the microstructures ( 20 ) and the substrate ( 1 ) can be realized. Connections to external circuitry can be realised. Microfluidic channels ( 10 ) in the microstructures ( 20 ) can be connected to external equipment. A method to fabricate and assemble the device is provided. |