| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eba31031cea643d335862f34cae756fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fece053e8c2ceac625d987b734f7c91a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47047c12fe01ecf4b21a2d7aa84f1049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7aec009fbad90958b43c276b257645e6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70983 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-54 |
| filingDate |
2004-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68080e66f89b505ccc0e0173a83b083f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f588d2cf1a41f30ee725fb8c11776fdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74e69cda13904d15ab5e94c112801a42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f47b5e1e9421870b3d1769f8c5ac8a7 |
| publicationDate |
2010-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010165314-A1 |
| titleOfInvention |
Mems device with controlled gas space chemistry |
| abstract |
A process for protecting a MEMS device used in a UV illuminated application from damage due to a photochemical activation between the UV flux and package gas constituents, formed from the out-gassing of various lubricants and passivants put in the device package to prevent sticking of the MEMS device's moving parts. This process coats the exposed surfaces of the MEMS device and package's optical window surfaces with a metal-halide film to eliminate this photochemical activation and therefore significantly extend the reliability and lifetime of the MEMS device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8767170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9798239-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012167206-A1 |
| priorityDate |
2001-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |