| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f1cdac90c4272d2ed510122d7153738 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12 |
| filingDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_564e301da1b4869088f4a7b6c5dccfa2 |
| publicationDate |
2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010155728-A1 |
| titleOfInvention |
Epitaxial wafer and method for fabricating the same |
| abstract |
An epitaxial wafer and method for fabricating the same can prevent a bowing phenomenon of the epitaxial wafer. The epitaxial wafer includes a substrate configured to be doped in a first doping concentration; an epitaxial layer configured to be formed over a first side of the substrate and doped in a second doping concentration lower than the first doping concentration; and a back seal layer configured to be formed over a second side of the substrate and include a layer having a tensile stress, wherein the second side is opposite to the first side, of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107968039-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020073218-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11201057-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102569350-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104425248-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10170312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103779372-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107256837-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2606809-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012126341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014048848-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10192739-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102800699-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I470831-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107611012-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110335939-A |
| priorityDate |
2008-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |