| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c3e0dd4313cef2a4f2999f5ceba5f65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20a75942f1197e1e7d077426cdd52796
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5ae89eb3639aeb1b795fe6ce09a09ff |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23P11-00 |
| filingDate |
2009-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_411b4d37f23b728ee1034cfddb71b959
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4bd87e04b6604821e803508e36cdc08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bfc66884bfa389a0bda6b1088c9e78c |
| publicationDate |
2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010143202-A1 |
| titleOfInvention |
Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same |
| abstract |
In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, clogging of a target nozzle for supplying the target material to a laser beam application point is suppressed. The target supply unit includes: a target container for accommodating the target material; a target nozzle for injecting the target material supplied from the target container; and a reducing gas supply unit for supplying a reducing gas into the target container. Instead of using the reducing gas, a carbon-based material having a reduction action may be provided within the target container for causing reduction reaction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019339620-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9039957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10237961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10609802-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11317501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9192039-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9097434-B2 |
| priorityDate |
2008-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |