patent/US-2010130005-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010130005-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbffa3b81b3b862dc7220b5648f5f745
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0085 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28B7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12
filingDate	2006-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5022c3e8f979ff1bc5797f5ceb416655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa8f92da82d4ed8c6650d727589d28ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc6ce63c80b98cdb57149cd5974bb030 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd5f3922a5ab3d29f9cff4a4085c05af
publicationDate	2010-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2010130005-A1
titleOfInvention	Method of forming carbon nanotube on semiconductor substrate, method of forming semiconductor metal wire using the same, and method of fabricating inductor using the same
abstract	A method of fabricating a semiconductor device by filling carbon nanotubes in a recess is disclosed. The method of fabricating the semiconductor device comprises patterning a mold on a substrate, coating carbon nanotubes on an entire surface of the recess and the mold formed by the patterning, filling the carbon nanotubes coated on the an entire surface of the mold in the recess, and removing the mold.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9617158-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013313523-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012301816-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012024918-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012097521-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9162893-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8906788-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011024950-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062568-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011049760-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9257510-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8410609-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102376633-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I474966-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312503-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8946094-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178011-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10570010-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8920696-B2
priorityDate	2005-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128738376 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8160

Total number of triples: 53.