http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010124791-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
filingDate | 2009-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed4f8b86dbb4da6842b2be6b27d0f71c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45865a0b386cd047088f5fc108334dba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ee604772909b594468f972a9d11345c |
publicationDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-2010124791-A1 |
titleOfInvention | Method to fabricate a chip for the detection of biological elements |
abstract | Improved method to fabricate a microelectronic device provided with at least one circuit to detect biological elements, comprising the steps of:n a) forming transistors,n depositing at least one layer in at least one insulating material ( 141 ) coating said transistors, forming one or more holes ( 143 ) in said layer of insulating material ( 141 ), so as to expose the upper face of the respective gate ( 135 ) of first-type transistors, filling the holes with a gate material, n b) removing, at least in part, the respective gate ( 135 ) of the first-type transistors, whilst the gate of second-type transistors is protected, the method prior to or at the same time as said removal conducted at step b) further comprising the removal of said gate material. |
priorityDate | 2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 187.