| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C225-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-404 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C249-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-08 |
| filingDate |
2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6adee253c7aa84eaea6b629cdc21b2df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1a62fffe6926a274f503bda1f17ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64dfd211fefbcb9a56bab9744057cfa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a7e8bdfa8e69b55b8615c94e0ac5869 |
| publicationDate |
2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010119726-A1 |
| titleOfInvention |
Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films |
| abstract |
This invention is related to Group 2 metal-containing polydentate β-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate β-ketoiminate precursors, wherein the polydentate β-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010143607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102918178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8962875-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952188-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8471049-B2 |
| priorityDate |
2008-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |