| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eca4d523cf8169f314ae8764288f54c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2abb615e39b2cb7cb1ea54789a9ff26e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33ae6d8fadc51bfd344a003f35fcbb14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d850f72bb861e34df76fb2ca42aeb722 |
| publicationDate |
2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010105594-A1 |
| titleOfInvention |
Process of purification of amidoxime containing cleaning solutions and their use |
| abstract |
The invention relates to processes for producing and using amidoxime compounds with low trace metal impurities. The invention further relates to compositions comprising amidoxime compounds with low trace metal impurities, such compositions useful for cleaning or removing residues from semiconductor substrates and/or equipment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105936824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013035272-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011218134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8129322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802609-B2 |
| priorityDate |
2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |