| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2010-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6145d843bb2083e39cdea2a0a82435d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2204efb59c62bd9c4b8cf28c7e1a0997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9861328c1e56b12ea21dd42477dde33 |
| publicationDate |
2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010104975-A1 |
| titleOfInvention |
Use of Blended Solvents in Defectivity Prevention |
| abstract |
The present invention provides a blended solvent for solubilizing an ultraviolet photoresist. The blended solvent comprises a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein the first solvent comprises a cyclic ester. A balance of the mixture comprises a second solvent, wherein the second solvent comprises a volatile organic liquid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2666175-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019033171-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6400161-B1 |
| priorityDate |
2005-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |