| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a5bbd75ca10131e0eefcebe6396e0dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2007-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6ae4860cdf7fa0199ea090f124ece65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acfc67f67329cc44d4210080e8d02e6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0904b4f649656cfb8640898dcad40de5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_271d9ad6c387c61883c90486d4db532d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b17f483ae640f9359259011cd2f8817 |
| publicationDate |
2010-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010102380-A1 |
| titleOfInvention |
Method of producing precision vertical and horizontal layers in a vertical semiconductor structure |
| abstract |
The present invention relates to providing layers of different thickness on vertical and horizontal surfaces ( 15, 20 ) of a vertical semiconductor device ( 1 ). In particular the invention relates to gate electrodes and the formation of precision layers ( 28 ) in semiconductor structures comprising a substrate ( 10 ) and an elongated structure ( 5 ) essentially standing up from the substrate. According to the method of the invention the vertical geometry of the device ( 1 ) is utilised in combination with either anisotropic deposition or anisotropic removal of deposited material to form vertical or horizontal layers of very high precision. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10163723-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9178106-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015104483-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9633907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101730709-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9177933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10376146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187718-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9209271-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015053929-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8673680-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10504792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011146771-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105684169-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8878231-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012064934-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10368788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3011380-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10820844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10879129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9876142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9871101-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015044622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015348848-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012061646-A1 |
| priorityDate |
2006-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |