http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010098836-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_657f8fe5931a3364fda9ccca712ad398 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-73 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate | 2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e985c891ccf1a63255ce43b4412a4aaa |
| publicationDate | 2010-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2010098836-A1 |
| titleOfInvention | Method and system for monitoring silane deposition |
| abstract | A silane deposition monitoring system includes a plasma processing vessel, a silane deposition sensor and a plasma field receptor. A method of monitoring silane deposition in a plasma processing apparatus includes placing the silane deposition sensor within a processing vessel in proximity with the plasma field receptor and optically assessing the silane deposition sensor for silane during or following plasma silanization. |
| priorityDate | 2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.