| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24ba129a4433fe5830a7f5eea24d88df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65a2c5ef91713def0b02d45a7a6185cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28575 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-425 |
| filingDate |
2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65d3c10fe182675410cfb8c095d7caf6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_893a28648ba548645233f3a448bf1cca |
| publicationDate |
2010-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010090347-A1 |
| titleOfInvention |
Apparatus and method for contact formation in semiconductor devices |
| abstract |
The present disclosure is directed to the preparation of a semiconductor substrate, and metallization of a contact area on the substrate to produce a contact in a semiconductor device. The method includes pre-treating the substrate by ultra fast laser treatment of a contact area, and depositing an interconnect metal layer on the contact area to create a contact. The process may include depositing a layer of dielectric-forming material on the substrate and removing a portion of the dielectric material from the substrate to reveal a contact area, prior to laser treating and metallization. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2830085-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11559827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10081535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374850-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10967400-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9281235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102891136-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8970046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013020720-A1 |
| priorityDate |
2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |