http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010062164-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c28418cd4da32e733f63f42fab95d1e2 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-16 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-02 |
filingDate | 2008-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a32ff459bac889b5a27761b9a0afcb49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_868d59f30ee516a9088f6f0e96ec4e21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80c328199fbcab33a72fe388f23feb1f |
publicationDate | 2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-2010062164-A1 |
titleOfInvention | Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating Process |
abstract | Methods and solutions for preventing the formation of metal particulate defect matter upon a substrate after plating processes are provided. In particular, solutions are provided which are free of oxidizing agents and include a non-metal pH adjusting agent in sufficient concentration such that the solution has a pH between approximately 7.5 and approximately 12.0. In some cases, a solution may include a chelating agent. In addition or alternatively, a solution may include at least two different types of complexing agents each offering a single point of attachment for binding metal ions via respectively different functional groups. In any case, at least one of the complexing agents or the chelating agent includes a non-amine or non-imine functional group. An embodiment of a method for processing a substrate includes plating a metal layer upon the substrate and subsequently exposing the substrate to a solution comprising the aforementioned make-up. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011108990-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298948-B2 |
priorityDate | 2008-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.