| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fda170ea22e046b0aa7abe6230fd6b27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f15f121551fa850e2ff8578b1d6090d9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788 |
| filingDate |
2009-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ed770a375bd8ee4b1d560ee992ec3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_197e5e48405dccdb6783925890cd23c5 |
| publicationDate |
2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010052033-A1 |
| titleOfInvention |
Lanthanide yttrium aluminum oxide dielectric films |
| abstract |
Electronic apparatus and methods of forming the electronic apparatus include a lanthanide yttrium aluminum oxide dielectric film on a substrate for use in a variety of electronic systems. The lanthanide yttrium aluminum oxide film may be structured as one or more monolayers. The lanthanide yttrium aluminum oxide film may be formed by atomic layer deposition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8154066-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9129961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007158765-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007087563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7776762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7972974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8405167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8541276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8114763-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288809-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7915174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501563-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7999334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8685815-B2 |
| priorityDate |
2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |