| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0ba62b01f5cd12e9573bb5b431e5ab0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_370396e618d6dfa59d12e490201d9ca5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae27a7a80f888ad76e909140be2aeed6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64fe8d77a2efa33fa7a1b26cc1927fb9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0796
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0041 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02 |
| filingDate |
2006-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77831202a198463074c5ffeaa2b3ab1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37f5a9efaa522bceebf87aa1475023b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae7276dd35ef2c09e062e359fedc7353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c62ad40e4faa4600c62c73084f9762c |
| publicationDate |
2010-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010051066-A1 |
| titleOfInvention |
Composition for removing residue from wiring board and cleaning method |
| abstract |
A composition for removing a residue from a wiring board containing an oxidizing agent and an azole compound and having a pH of from 1 to 7 and a cleaning method of a wiring board for removing a residue after dry etching by using this composition are provided. By using the composition for removing a residue of the present invention, in manufacturing a wiring board, residues remaining after dry etching which are derived from a resist or metals can be effectively removed without corroding titanium or titanium alloys with high corrosiveness. In particular, a semiconductor device using a wiring board containing titanium or titanium alloys can be efficiently manufactured. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9902925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011259373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10800972-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11072767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10104783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2916627-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015307819-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9803162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11149231-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9528079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10377948-B2 |
| priorityDate |
2005-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |