| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2202-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y20-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-12 |
| filingDate |
2009-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d46a3a9202f76a64556811145eb5478 |
| publicationDate |
2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010040771-A1 |
| titleOfInvention |
Method and apparatus for manufacturing thin film, and method for manufacturing electronic device |
| abstract |
A method for manufacturing a thin film, includes the steps of: mixing a thin-film forming material and a surfactant to prepare a dispersion in which the thin-film forming material is dispersed; forming a dispersion film from the dispersion at an inner circumference side of ring-shaped holding means; relatively moving a cylindrical supporter and the dispersion film while being in contact with each other so that the dispersion is transferred on a surface of the supporter to have a film shape, the supporter being disposed between a central portion of an inside space of the holding means and an outer circumference thereof and along an inner circumference of the holding means; drying the dispersion having a film shape formed on the surface of the supporter to form the thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108878259-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015243682-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101792120-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8604332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104505143-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104505141-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104505144-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9577105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011109123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011217451-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8607651-B2 |
| priorityDate |
2008-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |