| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F1-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-026 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F1-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J15-0616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J15-0052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J15-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2009-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d329ccbfc8142c5d44e02566dcfe27b1 |
| publicationDate |
2010-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010034625-A1 |
| titleOfInvention |
Magnetic pad for end-effectors |
| abstract |
Embodiments of the present invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the present invention provides an apparatus comprising one or more end effectors having a plurality of end effector pads disposed thereon without mechanically joining to the one or more end effectors. In one embodiment, a plurality of end effector pad assemblies are coupled to one or more end effectors by magnetic force. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9732778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9140279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022089746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021257488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109202940-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11027437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9760023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I625288-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015148079-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10444641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I809480-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015146187-A1 |
| priorityDate |
2008-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |