| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00ec2a22a879ef0870bd0bf38b692522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1621e69ccea431089e5d498b3be80b89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_957aad3506d1d5051aac7c2cd5d99055 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2008-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cd3a6fee0f2f658307ee6e636e33cde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38702242be7d0bbbe9032ffc58f1ab9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14471ed6e03e99d7c1a207c4f5c96da1 |
| publicationDate |
2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010029079-A1 |
| titleOfInvention |
Chemical mechanical polishing composition and methods relating thereto |
| abstract |
A chemical mechanical polishing composition useful for chemical mechanical polishing of a patterned semiconductor wafer containing a nonferrous metal. The chemical mechanical polishing composition comprises an inhibitor for the nonferrous metal; a copolymer of poly(ethylene glycol)methyl ether (meth)acrylate and 1-vinylimidazole; and water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10124464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9944828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9834704-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9688885-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014308814-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016065060-A1 |
| priorityDate |
2008-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |